Training - F3004I

F3004I - i-line Illumination System


This four-day course introduces the student to repair, maintenance, and adjustment procedures for the i-line illuminator system for 3000 Series steppers.

Performance Objectives
System overview
Intensity and uniformity
Intensity degradation checks
Illumination system calibration
Uniformity degradation checks
FRA intensity degradation check
Exposure shutter replacement


FPA 3000 i4 Operations Online Training course and F3006 Periodic Maintenance

Applicable Models

i4, iW, i5, i5+

Course Schedule

Please call for class schedule.

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