Training - F3002A

  
  
F3002A - Alignment

Introduction


This five-day course is designed to provide the students with in-depth explanation on the alignment system of the FPA-3000 Series steppers. The primary goal is to provide the student with the knowledge required to maintain and optimize the stepper alignment performance.

  
Performance Objectives
  
  
Basics of TVPA
  
Parameters of TVPA
  
TVPA sequence
  
TVPA tuning
  
Basics of AGA
  
AGA compensation mode
  
GAUS
  
Alignment error calculations
  
AGA abnormality check
  
Calibration command
  
AGA optimization
  
Mix & match overlay
  
AGA multi spot measurements
  
XY simultaneous measurement AGA
 
  

Prerequisites

FPA 3000i4 Operations Online Training and F3001 Introduction to Parameters & Commands (Stepper Software)

Applicable Models

All 3000 Series steppers

Course Schedule

Please call for schedule

  
Email Contact - semi-registry@cusa.canon.com