FPA-5510iZ Stepper


About FPA-5510iZ Stepper


  • The FPA-5510iZ incorporates Canon's many generations of step-and-repeat know-how into the highly successful and cost effective FPA-5500 platform to provide an improved system offering superior overlay and throughput performance
  • The FPA-5510iZ overlay accuracy is reduced to 20nm through improvements to focus and tilt compensation accuracy, stage and environmental temperature control and auto-calibration functions
  • With its 4.5kW high-pressure Mercury Lamp, super-high transmittance optical system, dynamic aberration correction, faster-than-ever wafer stage and optimized wafer handling system, the FPA-5510iZ delivers and sustains high productivity for 200mm (160wph) and 300 mm wafers (100 wph)