FPA-3030i5+ Stepper


About FPA-3030i5+ Stepper


Canon FPA-3030 platform provides performance and productivity improvements. The FPA-3030i5+ is capable of providing imaging resolution below 0.35 microns, while maintaining overlay accuracy of less than or equal to 40nm and throughput equal to or in excess of 104 wafers per hour. Canon developed the FPA-3030i5+ system to meet and exceed the imaging, overlay and productivity requirements of environmentally-conscious device and MEMS manufacturers.