FPA-6000ES6a Scanner

DUV Scanners
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About FPA-6000ES6a Scanner

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Specifications

Main Unit Spec

Model TypeKrF (248nm) DUV Scanner
Wafer Size300mm; 200mm
Resolution≤90nm
Numerical Aperture (NA)0.55 ~ 0.86
Reticle Size6in. (0.25in. thick)
Reduction Ratio4:1
Field Size26mm x 33mm
Overlay Accuracy≤ 8nm (|m|+3, Single Tool Overlay)
≤18nm (|m|+3, Mix & Match Overlay)
Throughput≥100wph (300mm, 122shots)
≥170wph (200mm, 58shots)