FPA-6000ES6a Scanner

DUV Scanners
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About FPA-6000ES6a Scanner

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Features

  • The NA0.86 projection optics system developed through Canon's advanced lens design and measurement technology enables the ES6a to print down to 90nm.
  • The AFIS (Advanced Flexible Illuminator System) improves efficiency of special illumination, and its flexible mode-settings allows users to freely design their own illumination modes.
  • Its high throughput and high resolution enables ES6a to replace some of the ArF layers needed at 90nm production and even at 65nm production, reducing the total cost of ownership.