FPA-5000ES4b Scanner

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About FPA-5000ES4b Scanner

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Specifications

Main Unit Spec

Model TypeKrF (248nm) Scanner
Wafer Size300mm; 200mm
Resolution≤110nm
Numerical Aperture (NA)0.55 ~ 0.80
Reticle Size6in. (0.25in. thick)
Reduction Ratio4:1
Field Size26mm x 33mm
Overlay Accuracy≤16nm (|m|+3)
Throughput≥67wph (300mm,122shots.)
≥121wph (200mm, 58shots)