| Course No. |
Course Title |
Days |
Applicable Models |
Schedule |
| F3001 |
Intro to Parameters & Commands |
5 |
All 3000 Series steppers |
Please call for schedule |
| F3002A |
Alignment |
5 |
All 3000 Series steppers |
Please call for schedule |
| F3002F |
Focus and Tilt |
4 |
All 3000 Series steppers |
Please call for schedule |
| F3003 |
Stage Evaluation and Troubleshooting |
4 |
i4, iW, EX3 |
Please call for schedule |
| F3004I |
i-line Illumination System |
4 |
i4, iW, i5, i5+ |
Please call for schedule |
| F3004R |
Reticle Changer |
3 |
All 3000 Series steppers |
Please call for schedule |
| F3004W |
Wafer Feeder |
3 |
All 3000 Series steppers |
Please call for schedule |
| F3005X |
Stage Evaluation and Troubleshooting |
4 |
i5, i5+, EX4, EX5, EX6 |
Please call for schedule |
| F3006 |
Periodic Maintenance |
5 |
i4, i5, i5+ |
Please call for schedule |
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